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KMID : 1011420160210040401
Journal of Korean Ophthalmic Optics Society
2016 Volume.21 No. 4 p.401 ~ p.407
Design and Development of F-theta Lens for 1064 §¬ Laser
Lee Dong-Hee

Park Seung-Hwan
Abstract
Purpose: To design and develop the f-theta lens for 1064 §¬ laser.

Methods: In order to design the f-theta lens that satisfies the user¡¯s conditions which are the laser beam diameter of 15 §®, the image point diameter of 30 §­ or less, the optical system thickness within 70 §®, the working distance of about 295 §®, and the effective image diameter within about 260 §®, method of setting the galvanomirror driving angles to eight zoom modes was used.

Results: By optimizing for the galvanomirror driving angles set to the eight zoom modes, we could design the f-theta lens of which characteristics have the effective image diameter within about 260 §®, the sign of the refractive power constructed in order of (+) (?) (+) (+), the resolving line width of 18.8 lps/§® (@ 40% MTF), the focal length of about 254 §®, the working distance of about 295 §®, and the maximum galvanomirror driving angle of ¡¾10.5¢ª.

Conclusions: In this study, by using the method to set the galvanomirror driving angles to multiple zoom modes for optimizing the f-theta lens design, we could easily design and manufacture the f-theta lens that satisfies user¡¯s requirement.
KEYWORD
1064 §¬ laser, F-theta lens, Marking machine, Galvanomirror, Distortion
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